Department Electrical and Computer Engineering Facility Name Nanofabrication Facility Off-Campus User Access Available Primary Contact Brian Thibeault Link Vacuum Deposition Category/Type Micro/Nanofabrication Search Tags vacuum deposition thin-film deposition sputtering sputter deposition e-beam evaporation thermal evaporation PECVD plasma-enhanced CVD CVD chemical vapor deposition ALD atomic layer deposition metallization dielectric deposition